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纳米级研磨技术及发展动向 论文 PDF3 y h) o1 y9 \. E
来源《新技术新工艺》杂志
) L. t( |# q$ T# Y% L# J3 k9 _! p纳米级研磨技术及发展动向 曹志锡 邓乾发 楼飞燕 袁巨龙 摘 要：概述了最近纳米级研磨技术的研究动态,同时介绍了研磨技术的原理、应用和优势,结合该方向的最新研究成果提出其近期的研究发展方向.
1 V# ` b: @1 u( h$ z; \( {关键词：纳米级;研磨技术;发展动向 e; N1 D+ S& K
分类号：TG749 文献标识码：A6 g H5 j% @, P: V6 I. I
Technology of a Nanometer Level Grinds and Its Development Trend |
* K2 ?' G0 u& y) a2 l4 W基金项目：国家自然科学基金重点项目(50535040)资助 D8 [# w" m- m. V, X2 J3 `
作者单位：曹志锡（浙江工业大学,310014） 8 y! d- A9 k* x3 F' }- U' A3 a
邓乾发（浙江工业大学,310014）
0 X8 Z; ^; z! B% ` 楼飞燕（浙江工业大学,310014）
6 N( j/ }6 d: f) t% c 袁巨龙（浙江工业大学,310014） ) B8 A5 G4 Y* k; {1 P& L. g1 @
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发表于 2007-3-25 15:06:20
