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纳米级研磨技术及发展动向 论文 PDF. a1 e9 m; U0 H8 y* x. f
来源《新技术新工艺》杂志" Y5 m: I1 v2 d
纳米级研磨技术及发展动向 曹志锡 邓乾发 楼飞燕 袁巨龙 摘 要:概述了最近纳米级研磨技术的研究动态,同时介绍了研磨技术的原理、应用和优势,结合该方向的最新研究成果提出其近期的研究发展方向.
* M* w, o3 d9 O3 R$ l( g" ]. K2 x关键词:纳米级;研磨技术;发展动向
9 O' \, _3 c+ F) D1 N! r. q分类号:TG749 文献标识码:A+ _# E+ g2 {; p2 j
Technology of a Nanometer Level Grinds and Its Development Trend |
' W1 h: ?' m: q o6 R d基金项目:国家自然科学基金重点项目(50535040)资助
, w2 l. Q7 p8 Z2 h2 Z6 C5 E4 Z: Z作者单位:曹志锡(浙江工业大学,310014) : ]+ j. {+ S* [' W3 k9 I( X6 [
邓乾发(浙江工业大学,310014)
; }+ o ]/ j- N2 Z& \ 楼飞燕(浙江工业大学,310014) 3 Z/ {: k# j* g) [2 j
袁巨龙(浙江工业大学,310014)
6 N* |9 ~ ~: s参考文献:
" \' m' @# w7 X* g- O! J[1]袁巨龙.功能陶瓷的超精密加工技术[M].哈尔滨:哈尔滨工业大学出版社,2000.
6 ?# e0 Q7 I5 |2 S[2]安永暢男.超精密加工における化学現象とその利用[J].精密工学会誌,1993,59,(4):7-10.2 d9 J1 I2 B+ F
[3]K.Horio,T.Kasai,Y.Ogata.A study on damaged layer remaining in diamond mirror cut surfaces[J],Annal of the CIRP,1992,41(1):137.
) v2 Z% I, U# b0 c( Q3 d[4]袁哲俊,王先逵,袁巨龙,等著.精密和超精密加工技术[M].北京:机械工业出版社,1999.4 A: }1 T* A' V2 Y$ y- _, x9 M- Y6 B: J
[5]華偉民,河西敏雄,崛尾健一郎,薦田みよ子.金属材料のラツピングによおける加工液の效果[J].1991年度精密工学会春季学術演講會演講論文集,1991:419.
- _2 {& a: T; M; p) G8 {[6]高瀬省得,河西敏雄.金属材料のラツピングおよび砥石研磨特性[J].1992年度精密工学会春季学術演講會演講論文集,1992:239.
" Y. w |2 v0 @1 W[7]杨建东,田春林,等.高速研磨技术[M].北京:国防工业出版社,2003.3 f* I$ a# |) r+ q9 ^
[8]Mori Y.,Ikawa N.,Okuda T.,Yamagata K.Numerically controlled elastic emission machining[J].Technology Reports of the Osaka University,26:283-94.
) l. _. M( U! L1 {! b[9]Mori Yuzo.,Ikawa Naoya.,Okuda Toru.,Sugiyama Kazuhisa.,Yamauchi Kazuto.Numerically controlled elastic emission machining-motion,Analysis of fluid and distribution of film thickness[J].Japanese Journal of the Society for Mechanical Engineers,1983,49(11):1-26.
$ L* {, Y6 v; U4 I2 P- e5 \[10]Mori Y.,Yamauchi K.,Endo K.Elastic emission machining as evaluated by atomistic techniques[J].Proc.of the 6th International Conference on Production Engineering,1987:58-63.3 T. R$ b- e$ w$ R3 d* |8 \
[11]Mori Y.,Yamauchi K.,Endo K.Mechanism of atomic removal in elastic emission machining[J].Precision Engineering,1988,10 (1):24-28.$ U) N! s1 V6 K* k1 O4 f$ p
[12]Mori Y.,Yamauchi K.,Endo T,Toyota H.Evaluation of elastic emission machined surfaces by scanning tunneling microscopy[J].Vac.Sci.Technol.A,1990,8(1):621-624.: F+ H' O* m5 f
[13]Kordonski W.Magneto-rheological finishing[J] Optical Fabrication and Testing Workshop,1992.
" L1 H2 |1 }, ~, ?, u1 o1 r% H[14]Evans.C.J,et al.Material removal mechanisms in lapping and polishing[J].Annals of the CIRP,2003,152:611-633.- y3 K, c% ~! {' p* {- B P/ y" m) F* d: ? @
[15]Kim.D.J,et al.A study on the development of in-process dressing lapping wheel and its evaluation of machining characteristics[J].Int J Adv Manuf Technol,2005,26:211-218.
- ]# I) p& f, x- A[16]袁巨龙,吕冰海,等.功能陶瓷超精密加工技术的现状与发展[J].世界制造技术与装备市场,2003(4):17-21.
+ m7 _6 e Y g# Y) M9 @- E4 B[17]赵萍,吕冰海,袁巨龙,等.智能型纳米级抛光机的运动分析[J].制造技术与机床,2003(7):19-22.
4 W# A+ C' U9 f[18]赵文宏,黄文君,袁巨龙,等.修正环型纳米级超精密抛光机智能控制系统的实现[J].机电工程,20(3):38-41.
0 b* Q9 W6 ?( \[19]赵文宏,袁巨龙,等.智能型纳米级抛光机的控制系统[J].制造技术与机床,2003(8):18-20.) u: u7 J4 Q J) G
[20]Yuan JL,Lou FY,et al.Research on ultra-precision process of STAVAX ESR[J].Advances in Materials Manufacturing Siience and Technologe,2004:63-66,471-472." }: q9 l# j& ?5 E0 o
[21]Yuan JL,Lou FY,et al.Research on ultra-precision machining technology for KTP[J].Advances in Materials Manufacturing Siience and Technologe,2004:471-472,473-476.' s$ d6 S3 s+ f9 Z$ T( Q) h' i# ^
[22]Yuan JL,Zhao P,et al.Lapping and polishing process for obtaining super-smooth surfaces of quartz crystal[J].Joural of Materials Processing Technologh,2003,138:116-119.
" Q4 J2 J% r/ ]+ M' `7 M. w[23]LV X,Yuan JL,et al.Study on ultra-precise machining of CLBO crystal[J].Key Engineering Materials,2006,304-305:398-402.+ }9 D" b q6 b# ?4 i
[24]Yuan JL,Lin B,et al.New ultra-precision polishing techniques of glass BK-7 optical plate[J].Key Engineering Materials.Advances in Abrasive Processes,2001,202-203:235-238.# t/ O2 @9 T) w; A: |" _
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