纳米级研磨技术及发展动向

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纳米级研磨技术及发展动向  论文 PDF
来源《新技术新工艺》杂志

纳米级研磨技术及发展动向 曹志锡　 邓乾发　 楼飞燕　 袁巨龙　 摘　要：概述了最近纳米级研磨技术的研究动态,同时介绍了研磨技术的原理、应用和优势,结合该方向的最新研究成果提出其近期的研究发展方向. 关键词：纳米级;研磨技术;发展动向 分类号：TG749 　文献标识码：A Technology of a Nanometer Level Grinds and Its Development Trend

基金项目：国家自然科学基金重点项目(50535040)资助 7 ?( J0 F. }0 _; n+ v# ?! ?作者单位：曹志锡（浙江工业大学,310014）　 2 _( c8 v) [. z! v: z: ^8 E* m　　　　　邓乾发（浙江工业大学,310014）　 : J& N' w4 c3 h　　　　　楼飞燕（浙江工业大学,310014）　 . t0 p8 I+ L+ e$ }　　　　　袁巨龙（浙江工业大学,310014）　 参考文献： [1]袁巨龙.功能陶瓷的超精密加工技术[M].哈尔滨:哈尔滨工业大学出版社,2000. 6 N# |% l* J1 _* Z) K( i. k[2]安永暢男.超精密加工における化学現象とその利用[J].精密工学会誌,1993,59,(4):7-10. [3]K.Horio,T.Kasai,Y.Ogata.A study on damaged layer remaining in diamond mirror cut surfaces[J],Annal of the CIRP,1992,41(1):137. [4]袁哲俊,王先逵,袁巨龙,等著.精密和超精密加工技术[M].北京:机械工业出版社,1999. # u0 [2 P3 W# X3 M: \[5]華偉民,河西敏雄,崛尾健一郎,薦田みよ子.金属材料のラツピングによおける加工液の效果[J].1991年度精密工学会春季学術演講會演講論文集,1991:419. [6]高瀬省得,河西敏雄.金属材料のラツピングおよび砥石研磨特性[J].1992年度精密工学会春季学術演講會演講論文集,1992:239. [7]杨建东,田春林,等.高速研磨技术[M].北京:国防工业出版社,2003. [8]Mori Y.,Ikawa N.,Okuda T.,Yamagata K.Numerically controlled elastic emission machining[J].Technology Reports of the Osaka University,26:283-94. [9]Mori Yuzo.,Ikawa Naoya.,Okuda Toru.,Sugiyama Kazuhisa.,Yamauchi Kazuto.Numerically controlled elastic emission machining-motion,Analysis of fluid and distribution of film thickness[J].Japanese Journal of the Society for Mechanical Engineers,1983,49(11):1-26. [10]Mori Y.,Yamauchi K.,Endo K.Elastic emission machining as evaluated by atomistic techniques[J].Proc.of the 6th International Conference on Production Engineering,1987:58-63. [11]Mori Y.,Yamauchi K.,Endo K.Mechanism of atomic removal in elastic emission machining[J].Precision Engineering,1988,10 (1):24-28. - E- ?' x2 b* [8 {2 G6 h[12]Mori Y.,Yamauchi K.,Endo T,Toyota H.Evaluation of elastic emission machined surfaces by scanning tunneling microscopy[J].Vac.Sci.Technol.A,1990,8(1):621-624. [13]Kordonski W.Magneto-rheological finishing[J] Optical Fabrication and Testing Workshop,1992. [14]Evans.C.J,et al.Material removal mechanisms in lapping and polishing[J].Annals of the CIRP,2003,152:611-633. [15]Kim.D.J,et al.A study on the development of in-process dressing lapping wheel and its evaluation of machining characteristics[J].Int J Adv Manuf Technol,2005,26:211-218. % |& l) Y1 e, j+ U* P1 }2 _[16]袁巨龙,吕冰海,等.功能陶瓷超精密加工技术的现状与发展[J].世界制造技术与装备市场,2003(4):17-21. [17]赵萍,吕冰海,袁巨龙,等.智能型纳米级抛光机的运动分析[J].制造技术与机床,2003(7):19-22. [18]赵文宏,黄文君,袁巨龙,等.修正环型纳米级超精密抛光机智能控制系统的实现[J].机电工程,20(3):38-41. * U( t7 @" P% `[19]赵文宏,袁巨龙,等.智能型纳米级抛光机的控制系统[J].制造技术与机床,2003(8):18-20. [20]Yuan JL,Lou FY,et al.Research on ultra-precision process of STAVAX ESR[J].Advances in Materials Manufacturing Siience and Technologe,2004:63-66,471-472. [21]Yuan JL,Lou FY,et al.Research on ultra-precision machining technology for KTP[J].Advances in Materials Manufacturing Siience and Technologe,2004:471-472,473-476. # y' ?: w- J/ Y) `5 _5 g[22]Yuan JL,Zhao P,et al.Lapping and polishing process for obtaining super-smooth surfaces of quartz crystal[J].Joural of Materials Processing Technologh,2003,138:116-119. [23]LV X,Yuan JL,et al.Study on ultra-precise machining of CLBO crystal[J].Key Engineering Materials,2006,304-305:398-402. % x! N$ e3 G$ P2 B[24]Yuan JL,Lin B,et al.New ultra-precision polishing techniques of glass BK-7 optical plate[J].Key Engineering Materials.Advances in Abrasive Processes,2001,202-203:235-238. 1 X& h7 [+ n! B# i5 G

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