纳米级研磨技术及发展动向

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纳米级研磨技术及发展动向  论文 PDF
6 q. c% I' X* G/ [9 {7 F$ t来源《新技术新工艺》杂志

纳米级研磨技术及发展动向 曹志锡　 邓乾发　 楼飞燕　 袁巨龙　 摘　要：概述了最近纳米级研磨技术的研究动态,同时介绍了研磨技术的原理、应用和优势,结合该方向的最新研究成果提出其近期的研究发展方向. * T4 \: h7 }" g- ~; }/ a关键词：纳米级;研磨技术;发展动向 : ^9 W. s$ A1 b% Y& V6 ~5 j分类号：TG749 　文献标识码：A 4 c/ d* E) v: m Technology of a Nanometer Level Grinds and Its Development Trend

基金项目：国家自然科学基金重点项目(50535040)资助 作者单位：曹志锡（浙江工业大学,310014）　 , m# Y; w5 t2 u5 H, ?9 A　　　　　邓乾发（浙江工业大学,310014）　 " i- k7 o# f# ~7 Z　　　　　楼飞燕（浙江工业大学,310014）　 ) a: ]1 c3 Z% ^' D  {# i　　　　　袁巨龙（浙江工业大学,310014）　 参考文献： [1]袁巨龙.功能陶瓷的超精密加工技术[M].哈尔滨:哈尔滨工业大学出版社,2000. [2]安永暢男.超精密加工における化学現象とその利用[J].精密工学会誌,1993,59,(4):7-10. [3]K.Horio,T.Kasai,Y.Ogata.A study on damaged layer remaining in diamond mirror cut surfaces[J],Annal of the CIRP,1992,41(1):137. [4]袁哲俊,王先逵,袁巨龙,等著.精密和超精密加工技术[M].北京:机械工业出版社,1999. [5]華偉民,河西敏雄,崛尾健一郎,薦田みよ子.金属材料のラツピングによおける加工液の效果[J].1991年度精密工学会春季学術演講會演講論文集,1991:419. 1 ]* l, V7 m" Y+ a7 ], S' u[6]高瀬省得,河西敏雄.金属材料のラツピングおよび砥石研磨特性[J].1992年度精密工学会春季学術演講會演講論文集,1992:239. [7]杨建东,田春林,等.高速研磨技术[M].北京:国防工业出版社,2003. 5 l0 q: S7 s% H[8]Mori Y.,Ikawa N.,Okuda T.,Yamagata K.Numerically controlled elastic emission machining[J].Technology Reports of the Osaka University,26:283-94. 6 {- ^4 V( u& C. d2 S) p3 n! `" s  F/ s[9]Mori Yuzo.,Ikawa Naoya.,Okuda Toru.,Sugiyama Kazuhisa.,Yamauchi Kazuto.Numerically controlled elastic emission machining-motion,Analysis of fluid and distribution of film thickness[J].Japanese Journal of the Society for Mechanical Engineers,1983,49(11):1-26. [10]Mori Y.,Yamauchi K.,Endo K.Elastic emission machining as evaluated by atomistic techniques[J].Proc.of the 6th International Conference on Production Engineering,1987:58-63. [11]Mori Y.,Yamauchi K.,Endo K.Mechanism of atomic removal in elastic emission machining[J].Precision Engineering,1988,10 (1):24-28. ( [  I1 Z8 g3 x$ Q& }7 V[12]Mori Y.,Yamauchi K.,Endo T,Toyota H.Evaluation of elastic emission machined surfaces by scanning tunneling microscopy[J].Vac.Sci.Technol.A,1990,8(1):621-624. ! b$ S& P. Y, ?[13]Kordonski W.Magneto-rheological finishing[J] Optical Fabrication and Testing Workshop,1992. [14]Evans.C.J,et al.Material removal mechanisms in lapping and polishing[J].Annals of the CIRP,2003,152:611-633. / ~" J! s; Q/ R3 P) I% v. L[15]Kim.D.J,et al.A study on the development of in-process dressing lapping wheel and its evaluation of machining characteristics[J].Int J Adv Manuf Technol,2005,26:211-218. [16]袁巨龙,吕冰海,等.功能陶瓷超精密加工技术的现状与发展[J].世界制造技术与装备市场,2003(4):17-21. [17]赵萍,吕冰海,袁巨龙,等.智能型纳米级抛光机的运动分析[J].制造技术与机床,2003(7):19-22. [18]赵文宏,黄文君,袁巨龙,等.修正环型纳米级超精密抛光机智能控制系统的实现[J].机电工程,20(3):38-41. % F2 x4 @2 T7 J" L9 F8 Q4 U2 Y+ X[19]赵文宏,袁巨龙,等.智能型纳米级抛光机的控制系统[J].制造技术与机床,2003(8):18-20. [20]Yuan JL,Lou FY,et al.Research on ultra-precision process of STAVAX ESR[J].Advances in Materials Manufacturing Siience and Technologe,2004:63-66,471-472. ; E" i6 b6 P+ d) C6 R/ [[21]Yuan JL,Lou FY,et al.Research on ultra-precision machining technology for KTP[J].Advances in Materials Manufacturing Siience and Technologe,2004:471-472,473-476. [22]Yuan JL,Zhao P,et al.Lapping and polishing process for obtaining super-smooth surfaces of quartz crystal[J].Joural of Materials Processing Technologh,2003,138:116-119. ' E4 A: n6 v' @* \4 `8 H[23]LV X,Yuan JL,et al.Study on ultra-precise machining of CLBO crystal[J].Key Engineering Materials,2006,304-305:398-402. 4 c  h" {7 D, i* d' r3 l[24]Yuan JL,Lin B,et al.New ultra-precision polishing techniques of glass BK-7 optical plate[J].Key Engineering Materials.Advances in Abrasive Processes,2001,202-203:235-238. 0 O7 }& l( Y2 ?$ w% s( a

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